MEMS devices and related scanned beam devices
Abstract
Embodiments relate to a MEMS device including a scanner rotatable about at least
one rotation axis, with the scanner having a characteristic resonant frequency.
According to one embodiment, the MEMS device includes drive electronics operable
to generate a drive signal that causes the scanner to oscillate at an
operational frequency about the at least one rotation axis. The drive signal has
a drive frequency selected to be about equal to the characteristic resonant
frequency or a sub-harmonic frequency of the characteristic resonant frequency.
According to another embodiment, the drive electronics are operable to generate
a drive signal having a plurality of drive-signal pulses that moves the scanner
at an operational frequency and sensing electronics are operable to sense a
position of the scanner only when the drive-signal pulses of the drive signal
are not being transmitted by the drive electronics. The MEMS device embodiments
may be incorporated in scanned beam imagers, endoscopes, and displays.
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