Induced resonance comb drive scanner
Abstract
Briefly, in accordance with one or more embodiments, a MEMS based scanning
platform is arranged to have increased efficiency by driving a first frame of
the scanning platform directly by applying a drive voltage to a set of comb
fingers disposed on the first frame to cause the first frame to oscillate via
torsional rotation of a first flexure and by driving a second frame of the
scanning platform indirectly via mechanical coupling of the second frame with
the first frame via a second flexure, wherein damping losses and work capacity
are such that the operation of the scanning mirror is more efficient than if the
set of comb fingers were disposed on the second frame and directly driven by the
drive voltage. The scanning platform may comprise a 1D scanner, a 2D scanner, or
a multiple-dimensional scanner.
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