Capacitive comb feedback for high speed scan mirror
Abstract
An image projection system (100) has a laser (102, 104, 106) providing at least
one beam (103, 105, 107) to a scan mirror apparatus (130) for scanning the at
least one beam (103, 105, 107) in two orthogonal directions (404, 406). The scan
mirror (130) includes an oscillating portion (204, 904) disposed contiguous to a
frame (202) and includes a reflective portion (218, 918) capable of reflecting
the beam (103, 105, 107). Circuitry (500) is provided for measuring the
capacitance between interdigitated teeth (212, 214, 912, 914) on the frame (202)
and the oscillating portion (204, 904).
http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO2&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&co1=AND&d=PTXT&s1=7,997,742&OS=7,997,742&RS=7,997,742
(for this and previous message, thanks to me_wwwing, Yahoo private MVIS forum)
